NOVELLUS 02-113640-00 System Controller

NOVELLUS 02-113640-00 System Controller  

Product Details Introduction

NOVELLUS 02-113640-00 System Controller (MC1 P166)

Novellus 02-113640-00 is a P166 level embedded system controller of the Novellus (now Lam Research) MC1 series, designed specifically for precision deposition equipment such as semiconductor CVD/PVD. It is the core unit for equipment process control, timing scheduling, and I/O management. The following are 15 core features:

Industrial grade P166 processor architecture: Equipped with a Pentium P166 processor and 64MB of memory, it meets the real-time control and multitasking requirements of semiconductor devices.

MC1 series dedicated main control platform: It belongs to the Novellus MC1 standard system controller and is compatible with mainstream deposition equipment such as Concept, Speed, Altus, etc.

Precision process timing control: supports microsecond level process timing scheduling, precise control of gas, vacuum, temperature, RF and other multi link coordination.

Multi channel I/O signal management: Integrated digital/analog I/O interfaces, which can directly connect peripheral execution units such as sensors, valves, power supplies, and motion modules.

Dual communication interface: comes standard with Ethernet and RS-485, supports Modbus TCP/IP protocol, and enables device networking and remote monitoring.

Built in PID closed-loop control: Provides high-precision PID algorithm to ensure stable process parameters such as temperature, pressure, and flow rate within the set range.

Wide voltage power supply design: Supports 220V industrial power supply and adapts to the standard distribution environment of semiconductor factories.

IP65 protection level: dustproof and waterproof, can operate stably in harsh industrial environments such as clean rooms and high dust.

CE/UL/RoHS certification: Compliant with international safety and environmental standards, meeting global semiconductor production line compliance requirements.

Hardware level fault diagnosis: onboard status indicator lights and fault detection circuits, supporting rapid localization of hardware abnormalities.

Firmware online upgrade: Supports updating control programs through network or local ports without the need for disassembly, making maintenance convenient.

High integration and compact design: with dimensions of approximately 10 × 15 × 20cm and a weight of 1.5kg, saving internal space of the equipment.

Long cycle stable operation: Industrial grade component selection, fanless heat dissipation, and mean time between failures (MTBF) meet the high reliability requirements of semiconductor equipment.

Compatible with Novellus original software: seamlessly integrate with Novellus device control software and process formulation system, reducing integration costs.

Complete spare parts and maintenance system: As a mature model, the global spare parts channels and maintenance services are mature, ensuring the long-term service of equipment.

In summary, NOVELLUS 02-113640-00, with P166 high performance, precision process control, and high reliability industrial design as its core, is a key control component for semiconductor deposition equipment to achieve automation, high precision, and stable operation. It is widely used in the thin film deposition process of wafer manufacturing.

02-113640-00   Product imag

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