Home > Product > Robot control system > MKS AX7710SM-01 Remote Plasma Source
MKS AX7710SM-01 Remote Plasma Source
- Goods status： new/used
- Delivery date: stock
- The quality assurance period： 365 days
- Phone/WhatsApp/WeChat：+86 15270269218
- Email：stodcdcs@gmail.com
- Tags：
- Get the latest price：Click to consult
MKS AX7710SM-01 Remote Plasma Source
Product Details Introduction
MKS AX7710SM-01 is a Remote Plasma Source (RPS) primarily used in semiconductor manufacturing, flat panel display manufacturing, and other high-precision industrial fields. The following are its main application areas and characteristics:
Main application areas
Semiconductor Manufacturing
Used for wafer cleaning, etching, and thin film deposition processes to remove photoresist and residues.
In advanced packaging technology, it is used for surface treatment and cleaning.
Flat panel display manufacturing
Used for cleaning and surface treatment in LCD and OLED panel manufacturing to improve display quality.
Used for etching and deposition processes in thin film transistor (TFT) manufacturing.
Manufacturing of solar cells
Used for silicon wafer cleaning and surface treatment to improve the efficiency of solar cells.
In the manufacturing of thin-film solar cells, it is used for etching and deposition processes.
Optical device manufacturing
Used for cleaning and surface treatment of optical components such as lenses and prisms to improve optical performance.
Research and Laboratory
Used for material surface modification, thin film deposition, and plasma research.
Product Features
Efficient cleaning: Through remote plasma technology, efficient and uniform surface cleaning is achieved.
Low damage: reduces damage to sensitive materials and is suitable for high-precision processes.
Flexible configuration: can adapt to multiple gases (such as O ₂, H ₂, N ₂, CF ₄, etc.) to meet different process requirements.
High stability: Advanced control technology is adopted to ensure long-term stable operation.
Easy to integrate: Modular design makes it easy to integrate into existing devices.
Low maintenance: The design is simple and the maintenance cost is low.
Product imag
Related website links
GE IS210BPPBH2BMD Controller Module
Kollmorgen MMC-SD-0.5-230-D servo drive
ASEA YM316001-NL Double Plate Component
Other website links
| SC755A-080-02 | SC452-002-03 | SCE952NN-504-01 |
| SC755A-001-02 | SC453-004-05 | SCE952NN-501-01 |
| SC754B-001-02 | SC452-011-15 | SCE902AN-001-01 |
| SC754A-001-01 | SC452-817-05 | SCE902-001-01 |
| SC753B-001-01 | SC453-002-03 | SCE906NN-050-01 |
| SC753A-005-01 | SC453-043-04 | SCE905-000-01A |
| SC753A-001-02 | SC725B001 | SCE905-001-01A |
| SC753A-001-01 | SC452-033-03 | SCE905AN-002-01 |
