MKS PR4000B-F2V2S0 digital power module

MKS PR4000B-F2V2S0 digital power module

 Introduction

MKS PR4000B-F2V2S0 digital power module

1. Integrated dual channel power supply and signal acquisition, suitable for use with MFC and pressure sensors

2.16-digit high-precision analog signal acquisition, stable reading of flow and pressure data

3. Built in backlit LCD display screen, real-time display of set values and actual working condition values

4. Support free switching between multiple types of engineering units and adapt to semiconductor process monitoring requirements

5. Equipped with two programmable alarm relays to achieve upper and lower limit abnormal alarm output

6. Equipped with RS232 communication interface as standard, it can be connected to the main control of the machine for remote control

7. Non volatile memory, automatically saves parameters when powered off, and does not require resetting when powered on

8. Built in multiple electrical protections to resist damage to devices caused by surges and electrostatic impacts

9. Automatic zeroing calibration function to reduce measurement drift errors during long-term operation

10. Metal rack shell, 19 inch half rack standard installation method

11. Excellent EMC electromagnetic compatibility design, stable operation in complex environments of clean workshops

12. Supports both local and remote setting modes, with flexible and diverse debugging methods

13. Independent processing of channel signals to avoid crosstalk between flow and pressure signals

14. Wide AC input voltage, suitable for small fluctuations in the production line power grid

15. Mature hardware solution from the original factory, supporting 24/7 uninterrupted mass production operation

The MKS PR4000B-F2V2S0 digital power module is widely used in semiconductor thin film and etching equipment, and is the core unit for power supply and monitoring of mass flow controllers and vacuum pressure sensors.

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