MKS AX8403A gas generator

MKS AX8403A gas generator

Product Details Introduction

The AX8403A from MKS Instruments is an ozone generator primarily used for industrial and laboratory applications that require high concentrations of ultra clean ozone.

Main features:

High concentration ozone output: Through silent discharge technology, pure oxygen is converted into high concentration ozone, suitable for processes that require high-purity ozone.

Ultra clean design: The required amount of nitrogen doping is minimal, significantly reducing the production of pollutants such as NOx compounds and ensuring high purity of ozone.

Flexible flow range: Supports oxygen flow rates of 5 to 20 slm to meet different process requirements.

Application areas:

Semiconductor manufacturing: used for processes such as wafer cleaning, surface treatment, and thin film deposition.

Photovoltaic industry: used for surface cleaning and passivation treatment in solar cell production.

Display panel manufacturing: used for cleaning and process optimization of LCD and OLED panels.

Medical Device Disinfection: Utilizing the strong oxidizing properties of ozone to efficiently disinfect medical devices.

Technical specifications:

Ozone output: up to 160 grams per hour.

Oxygen flow range: 5 to 20 slm.

Power requirements: 208V, three-phase, 50/60 Hz, 20A.

Cooling requirements: Water cooling is required, with a water temperature range of 5 to 25 ° C and a minimum water flow rate of 7.6 lpm.

Size and weight: 483 x 445 x 267 mm, weighing approximately 59 kg.

Product imag

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