DPCA-26028 Mass Flow Controller

DPCA-26028 Mass Flow Controller 

Product Details Introduction

DPCA-26028 Quality Flow Controller Product Application Fields

The DPCA-26028 mass flow controller, as a high-precision gas flow control core equipment, is based on the principle of thermal measurement and has flow control accuracy within ± 0.8% and sub second response speed. It can compensate for errors caused by temperature and pressure fluctuations in real time, support dual communication of analog signals and digital buses, and adapt to the precise gas ratio and flow stability control needs in various industrial and scientific research scenarios. It is widely used in semiconductor manufacturing, new energy, biopharmaceuticals and other fields. The core application scenarios are as follows:

1. In the field of industrial automation control, it is suitable for industrial control core equipment such as PLC (Programmable Logic Controller), frequency converter, servo system, etc., providing stable DC power supply to ensure the continuous and accurate operation of automated production lines, intelligent warehousing equipment, industrial robots and other systems. It can withstand complex environments such as voltage fluctuations and electromagnetic interference in industrial sites. 1. In the field of semiconductor manufacturing: adapt to core process equipment such as chemical vapor deposition (CVD), plasma etching, ion implantation, etc., accurately control the flow rate and ratio of process gases such as SiH ₄, NH ∝, CF ₄, etc. Its high control accuracy can ensure the uniformity of semiconductor film deposition and the precision of etching process, while also being compatible with the harsh environmental requirements of semiconductor cleanrooms, helping to improve chip manufacturing yield.

2. In the field of new energy and hydrogen energy: applied in the deposition process of photovoltaic silicon wafers and gas flow control in the manufacturing of thin-film solar cells (CIGS, CdTe); At the same time, it is compatible with fuel cell test benches and electrolytic water hydrogen production equipment to achieve dynamic ratio and stable flow monitoring of gases such as hydrogen and air. Flow fluctuations can be controlled within ± 0.3%, ensuring the performance of new energy products and the accuracy of test data.

3. Biopharmaceutical and medical fields: used for regulating the flow of O ₂ and CO ₂ in drug fermentation processes, precise control of CO ₂ concentration in cell culture chambers, and flow regulation of O ₂ and N ₂ O mixed gases in anesthesia machines and ventilators. Its small flow control capability and high stability can meet the strict safety requirements of medical equipment and pharmaceutical processes, with an error of less than 1% to ensure diagnosis, treatment, and production safety.

4. In the field of fine chemicals and new materials, it is suitable for chemical processes such as catalytic reforming and reactor gas feeding, and accurately controls the flow ratio of gases such as ethylene, propylene, and H ₂; Simultaneously applied in the preparation process of new materials such as special fiber preform deposition and advanced ceramic sintering, the reaction efficiency and material properties are optimized through stable gas flow control, and some scenarios can be adapted to high pressure resistance and corrosion resistance requirements.

DPCA-26028 Product imag

DPCA-26028 ontroller Module

5X00226G02 Analog input module
5X00481G01 analog output module
5X00594G01 analog output module

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