VDMW300022V2 Steam Delivery Module

VDMW300022V2 Steam Delivery Module 

Product Details Introduction

Core positioning

The core function of the VDM series steam delivery module from the American Celery brand is to uniformly vaporize liquid chemical precursors and accurately transport them. It is designed specifically for semiconductor and thin film processing scenarios and is compatible with reaction chamber systems such as CVD, ALD, PECVD, etc.

Core product features

Capable of high-precision gasification and flow control, ensuring the stability and uniformity of steam transportation, and meeting the requirements of precision processes; Supports dual communication interfaces of Ethernet and I/O, enabling remote monitoring and local control, with flexible and convenient operation; Modular design with compact structure, integrated fast melting fuse protection and diagnostic port, easy maintenance and high safety; Compatible with various liquid precursors such as TEOS, TDMAT, etc., with strong compatibility, suitable for multiple types of thin film deposition processes.

Quick overview of key features

Specification parameters: 250V/3A power supply protection, steam flow range of approximately 3 SLPM H ₂ O

Interface configuration: including analog/digital I/O, diagnostic port, Ethernet interface, and drain quick plug connector

Reliability: Industrial grade protective design, neat appearance without disassembly or repair, tested for power and interface functionality

Application scenarios

Typical scenarios: semiconductor process equipment, optoelectronic thin film and display manufacturing, nanomaterial deposition, laboratory steam transport testing

Core Value: Ensuring uniformity of precursor vaporization, improving process stability, simplifying system integration and maintenance processes

VDMW300022V2  Product imag

VDMW300022V2  ontroller Module

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