AMAT Applied Materials 600369 Automatic Temperature Controller

AMAT Applied Materials 600369 Automatic Temperature Controller

Product Details Introduction

1. Adaptation scenarios and functions (600369)

Equipment adaptation: Matched with AMAT semiconductor process equipment (such as CVD deposition chambers, etching machine heating modules), used for precise temperature control of chamber walls, reaction trays, heating tubes, and other components in wafer processing, suitable for the entire process of 300mm wafer manufacturing.

Process compatibility: Focusing on high cleanliness and high temperature process scenarios, it is compatible with processes that require stable temperature control such as thin film deposition (such as metal and dielectric deposition) and wafer annealing. It can be linked with the AMAT equipment main control system to achieve sequential adjustment of process temperature.

Core function: Real time monitoring, automatic adjustment, and abnormal alarm of temperature in multiple areas, ensuring process temperature stability and avoiding problems such as uneven thickness of wafer thin films and abnormal etching rates caused by temperature fluctuations.

2. Accuracy and Performance (600369)

Temperature control accuracy: Temperature control range -50-500 ℃, temperature control error ≤ ± 0.1 ℃ (core range of 200-400 ℃), temperature resolution 0.01 ℃, suitable for the strict temperature requirements of 3x nanometer processes.

Response performance: Temperature sampling frequency ≥ 10Hz, heating/cooling adjustment response time ≤ 1s, supports PID self-tuning algorithm, can automatically compensate for the impact of environmental temperature and load changes on temperature control, continuous operation without temperature drift.

Output capability: Supports multi-channel analog output (4-20mA), can drive actuators such as heating rods and refrigerators, with a maximum output power of ≤ 5kW per channel, suitable for the power requirements of different heating modules.

3. Structure and Protection (600369)

Protection design: The shell is made of industrial grade flame-retardant metal material, with a protection level of IP65, and is resistant to dust and workshop cleaning splashes; The internal circuit is designed with anti-static (ESD) and electromagnetic interference (EMI) protection, and has passed the EN 55032 Class B electromagnetic compatibility test.

Installation adaptation: Compact structure (size approximately 180 × 100 × 60mm), supporting panel embedded/rail mounted installation, suitable for limited space inside equipment control cabinets; The wiring terminals are equipped with anti misoperation signs and screw locks to prevent loose wiring caused by vibration.

Easy to operate: equipped with a 2.4-inch LCD display screen, supporting Chinese/English interface switching, can intuitively display real-time temperature, set values, and alarm information; Comes with physical buttons, supports local parameter settings, and can also be remotely controlled through RS-485 interface.

AMAT Applied Materials  600369 Product imag

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