Tokyo Electron 2981-600465-11 Connection Board

Tokyo Electron 2981-600465-11 Connection Board

Product Details Introduction

The Tokyo Electron 2981-600465-11 connection board is a specialized interface component used in TEL semiconductor equipment, mainly for electrical signal connection and distribution between internal modules of the equipment.

1、 Main functions

Realize the transmission of electrical signals between the control board and other functional modules.

Provide stable power and signal connections, support high-speed data and low-noise transmission.

A unified interface platform for modular design of equipment, facilitating installation and maintenance.

2、 Application Fields

Semiconductor etching equipment: Establish connections between the main control system and the vacuum chamber, sensors, and actuators.

Thin film deposition equipment (CVD/ALD): Connect the temperature control unit, gas valve group, and vacuum monitoring components inside the chamber.

Lithography equipment: serves as a signal channel between the light source control module and the system control motherboard.

Cleaning or developing equipment (Clean Track): used to connect multiple submodules to the central control unit.

3、 Characteristics

Multi channel signal interface, suitable for complex internal control systems.

Equipped with standard connectors for modular maintenance and replacement.

The wiring structure specification complies with the electromagnetic compatibility and electrical safety requirements of TEL equipment.

4、 Applicable device platform (example)

Unity Pro

Trias

Indy

Clean Track ACT/Mark series, etc

5、 Application industry

Semiconductor Manufacturing (Pre Process)

Display panel manufacturing (LCD/OLED)

Microsystem Manufacturing (MEMS)

Packaging equipment automation system

Product imag

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