Gasonics 853-4290-001 Load Lock Elevator Module

Gasonics 853-4290-001 Load Lock Elevator Module

Product Details Introduction

1、 Product Overview

Gasonics 853-4290-001 is a Loadlock Elevator Module installed in Gasonics plasma processing equipment. Its main function is to control the lifting action of the sample tray in the chamber and achieve wafer loading and unloading. This type of module usually works in coordination with vacuum systems, robotic arms, and main processing chambers, and is a key component in semiconductor automation on-chip systems.

2、 Technical role

Realize the vertical lifting action of the wafer in the vacuum load lock chamber;

Control the entry or exit of wafers from the transfer system into or out of the main process chamber;

Cooperate with pneumatic or motor drive systems to achieve precise position control;

Provide communication feedback (such as in place signals) between the device controller (PLC/HMI);

3、 Application Fields

1. Semiconductor wafer manufacturing

Load lock structure used in Gasonics plasma stripping equipment (such as PEP, Aura series) to achieve wafer transfer;

The key process stages include: photoresist stripping after photolithography, dry cleaning, thin film processing, etc;

Commonly used in automatic wafer loading and unloading systems for 150mm, 200mm, and even 300mm wafers.

2. Production of compound semiconductors/power devices

Elevator modules are used to ensure wafer transfer in high cleanliness environments during the production of compound semiconductors such as GaN and SiC;

Reduce particle pollution and adapt to precision processing of various materials.

3. Pre packaging and testing process equipment

In situations where surface modification or plasma activation treatment is required, the load lock elevator module supports high-throughput loading and unloading operations;

Improve equipment automation level and reduce manual intervention.

4. Precision machining equipment for FPD/optoelectronic industry

In OLED/LCD or micro nano device processing equipment, similar lifting modules can also be used in conjunction with vacuum processing units.

Product imag

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