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Gasonics AWD-D-1-0-021-004 Control Module
- Goods status： new/used
- Delivery date: stock
- The quality assurance period： 365 days
- Phone/WhatsApp/WeChat：+86 15270269218
- Email：stodcdcs@gmail.com
- Tags：AWD-D-1-0-021-004
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Gasonics AWD-D-1-0-021-004 Control Module
Product Details Introduction
The Gasonics AWD-D-1-0-021-004 control module is a key electronic control unit used in Gasonics plasma stripping equipment, mainly responsible for precise control of a functional subsystem within the system, such as gas flow rate, power management, vacuum control, or temperature control. This module plays a core role in signal processing and execution control in plasma cleaning or stripping systems.
1、 Product Overview
The Gasonics AWD-D-1-0-021-004 control module is an integrated industrial control board or control unit that may be embedded within the equipment control system to control a specific functional block. This numbering format (AWD-D-1-0-021-004) complies with the Gasonics internal component coding specification, indicating that it belongs to submodule 021 of the AWD (which may represent a functional domain or control architecture) series of modules.
2、 Technical functions (possible control functions)
As this module is a dedicated control unit, common control functions include:
Plasma power control
Manage RF power switches, power regulation, protection interlocks, etc
Gas flow control
Control the command output of MFC (Mass Flow Controller) to accurately adjust the mixing ratio of reaction gases
Vacuum pump system control
Control the start/stop of vacuum pump, chamber pressure regulating valve, etc
Temperature/Heating Management
Set temperature control and over temperature protection for heating areas such as chambers and slide tables
Signal Processing and Communication
Receive sensor feedback signals and upload status information to the main control system
Product imag
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