Gasonics 04630-003 Indexer

Gasonics 04630-003 Indexer

Product Details Introduction

The Gasonics 04630-003 indexer is a wafer transport device or component used in Gasonics plasma stripping systems, typically responsible for precise positioning, transportation, loading and unloading of wafers in the processing flow. It is an indispensable motion control module in automated plasma cleaning equipment.

1、 Product Overview

The Gasonics 04630-003 indexer is a mechanical execution component installed inside the plasma stripping machine or wafer handling subsystem, responsible for the "step-by-step" position conversion of wafers in the processing flow, that is, precise movement of wafers between multiple processing stations. For example, positioning and conveying between the upper wafer position in the front section, the middle reaction chamber, and the lower wafer position in the rear section.

2、 Technical functions

Wafer positioning: Automatically align the wafer with the center of the reaction chamber to improve processing uniformity

Step by step drive: Complete the step-by-step movement of wafers through precision motors or pneumatic mechanisms

Synchronize with the system: Communicate with the Gasonics main controller to achieve process linkage

Position feedback: Built in sensors (such as photoelectric or proximity switches) provide feedback on the current workstation status

3、 Application Fields

The 04630-003 indexer is commonly used in the following Gasonics systems (models may be Aura, L3510, PEP series, etc.):

Wafer loading/unloading process

Automatically pick up, move, and place pieces from FOUPs, boxes, or cartridges

Wafer transfer before and after plasma stripping reaction

Accurately feed the wafer into the center of the cavity and send it out after processing

Wafer distribution/integrated control in multi cavity systems

Switching wafer positions between multiple process chambers, supporting assembly line processes

Product imag

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