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Gasonics 16254-02 Operating Interface Panel
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Gasonics 16254-02 Operating Interface Panel
Product Details Introduction
The Gasonics 16254-02 operation interface panel is a human-machine interaction module (HMI) in the Gasonics plasma stripping system, used to control and monitor equipment operation status, provide operation command input, process parameter settings, and system alarm display functions.
1、 Product Overview
The Gasonics 16254-02 operator interface panel is the main control interface installed on the Gasonics system equipment console, typically a panel or embedded structure, equipped with buttons, knobs, display screens (such as LCD/VFD, etc.), serving as a bridge between the operator and the equipment. This panel may belong to the control system of Gasonics Aura, L3510, or other early stripping models.
2、 Technical characteristics
Model identification: 16254-02 is the part number, which may represent a specific version of the standard control panel
Interface form: It may be connected to the main controller through parallel port, serial port, or dedicated communication protocol
Operation function:
Device start/stop
Vacuum pump, RF power control
Input of setting parameters such as process time and gas flow rate
Status indicator light/alarm information display
3、 Application scenarios
This panel is suitable for operational control tasks in the following Gasonics devices:
Plasma stripping system (such as Gasonics Aura 2000, L3510, PEP series)
Initiate and monitor operations such as photoresist removal and cavity cleaning
Production line interactive interface
Interact with the front-end feeding system or back-end testing system to set process parameters
Used in maintenance and diagnostic mode
Display device error codes and system status information to assist technicians in troubleshooting
Product imag
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