Gasonics 16474-01 Microwave Power Generator

Gasonics 16474-01 Microwave Power Generator

Product Details Introduction

Product Overview:

Gasonics 16474-01 is an industrial microwave power generator mainly used in plasma process equipment to provide stable high-frequency power for microwave plasma excitation systems. This device was designed and manufactured by Astex (later incorporated into Gasonics/Novellus) and is commonly used in semiconductor thin film processing, ashing, cleaning, and plasma assisted etching processes.

Technical parameters (typical):

Output power: 1250 watts (microwave output)

Microwave frequency: 2.45 GHz (industry standard frequency)

Input power supply: single-phase AC 200-240V, 50/60Hz

Output voltage: approximately 4300 VDC (high voltage power output)

Control mode: external analog signal control or equipment automatic control

Interface: Standard industrial connectors and trigger ports

Cooling method: forced air cooling or liquid cooling (depending on the specific installation version)

Shell form: Metal encapsulation, 19 inch rack mounted structure

Application scenarios:

Plasma Asher System

Excitation of high-energy microwave field for stripping photoresist and impurity residues.

PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment

Provide microwave energy to the deposition system for generating plasma deposited thin films.

Plasma etching system

Used for plasma excitation in semiconductor chip microstructure processing.

Gasonics Aura 2000, L3510 series equipment

As the original microwave power module in the above-mentioned equipment, it works in conjunction with other power sources and control systems.

Product advantages:

Stable output power and precise frequency control

Perfectly compatible with mainstream old model devices such as Gasonics

Modular design for easy replacement and maintenance

High reliability, suitable for continuous operation in semiconductor production environments

Can be used as original factory parts for maintenance, replacement, or system upgrades

Product imag

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