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Gasonics 94-1104 Microwave Power Generator
- Goods status： new/used
- Delivery date: stock
- The quality assurance period： 365 days
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- Email：stodcdcs@gmail.com
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Gasonics 94-1104 Microwave Power Generator
Product Details Introduction
Product Overview:
Gasonics 94-1104 is a microwave power generator commonly used in semiconductor process equipment, especially in plasma excitation systems, to provide stable microwave power to excite gas and form plasma. This component is produced by Astex (later under Gerling/Gasnics) and is an industrial grade high-frequency microwave energy source widely used in PECVD, plasma etching, and ashing systems.
Technical parameters (typical):
Output power: approximately 1250 watts (microwave output)
Output voltage: approximately 4300 VDC
Input power supply: AC 190-240V, single-phase power supply
Operating frequency: 2.45 GHz (standard microwave frequency)
Control mode: external control signal or local adjustment
Packaging form: Industrial rack mounted module
Cooling method: air-cooled or water-cooled (depending on the version)
Application scenarios:
Plasma excitation system
Provide microwave energy for activating the reaction gas to form high-density plasma.
PECVD process equipment
Support plasma chemical vapor deposition (such as thin film deposition, dielectric layer deposition, etc.).
Semiconductor etching and ashing machine
Used to drive microwave sources in plasma etching or photoresist removal systems.
Gasonics Aura series equipment
Installed as a microwave energy core component in older models such as Aura 2000 and L3510 systems.
Product advantages:
Stable microwave output, supporting high-density plasma generation
Native compatibility with multiple old Gasonics process equipment models
Industrial grade structure, suitable for long-term stable operation
Can be used as original repair replacement parts for old equipment, extending the service life of the equipment
Product imag
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