Gasonics A95-205-01 Lamp Illuminator Power Box
Product Details Introduction
Product Overview:
Gasonics A95-205-01 is a power box component for lighting fixtures in semiconductor plasma equipment, mainly providing stable power drive for high-intensity lighting systems such as ultraviolet lamps or xenon lamps. This module is often used as one of the standard light source power supply components for Aura 2000-LL and other models, responsible for lighting up and maintaining stable operation of lighting sources, supporting precise operation of equipment in cleaning, peeling, and testing processes.
Technical parameters (typical):
Power type: Special lighting fixture power module
Input voltage: Typically AC 110V or AC 220V (depending on equipment configuration)
Output characteristics: High voltage DC or pulse power supply, used to drive UV/xenon lamp light sources
Adaptation system: Gasonics Aura 2000-LL, AURA 1000 and other old model peeling/cleaning equipment
Structural form: Industrial grade metal packaging module, equipped with cooling and ventilation design
Interface form: Multi pin connection port, capable of synchronous control with the main system
Application scenarios:
Plasma Asher process
Support the removal of photoresist, residual carbon layers, etc., and provide high brightness illumination during the cleaning process.
Wafer or mask inspection process
Lamp source illumination is used in defect inspection systems to achieve high contrast and high-definition observation.
Semiconductor equipment maintenance and troubleshooting lighting
Ensure stable lighting in the internal cabin during equipment operation for easy operation and maintenance.
Used in conjunction with A95-053-02
Often used as a supplementary power component for A95-053-02, it together forms a complete lighting system.
Product imag

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