Gasonics L-3510 486 Control Motherboard

Gasonics L-3510 486 Control Motherboard

Product Details Introduction

product name

Gasonics L-3510 486 Control Motherboard

Product application areas

Main control system of semiconductor plasma ashing equipment

This motherboard is the core control unit of Gasonics L-3510 plasma ashing machine, responsible for equipment startup, operation, monitoring, and coordinated control of various subsystems.

Internal logic and process control of equipment

Process operation flow logic through Intel 486 architecture processor, including reaction chamber control, temperature monitoring, gas flow control, RF power management, etc.

Graphic User Interface and Display Driver Support

Used in conjunction with the display driver board and receiver board to achieve the display function of the control panel, providing the operator with a human-machine interaction interface and fault prompt information.

Wafer handling and robotic arm control system

Cooperate with the pneumatic module and motor drive module to control the loading, handling, and unloading of wafers in the processing chamber, ensuring the continuity of the process flow.

On site equipment maintenance and technical upgrade replacement

Used to replace the aging or malfunctioning main control board of the original machine, achieve maintenance, recovery or performance improvement of old equipment, and maintain normal system operation.

Teaching and Technology Research Platform

Some research institutions or teaching units use retired Gasonics equipment for equipment operation principle teaching and system control research. As a typical industrial control device, this motherboard has research and demonstration value.

Product imag

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