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Gasonics 90-1079 Fault Detection Module
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Gasonics 90-1079 Fault Detection Module
Product Details Introduction
product overview
Gasonics 90-1079 is a fault detection module specifically designed for plasma cleaning equipment, mainly used to monitor equipment operation status, detect system abnormalities, and issue alarm or shutdown signals to the control system. It is usually integrated into the Gasonics Aura series equipment to ensure the stability and safety of the process.
Technical parameters (typical characteristics)
Module type: Electronic fault detection module
Detection content: power status, signal interruption, sensor failure, vacuum/air pressure abnormality, etc
Interface type: Communicate with the main control board or PLC through parallel/serial signals
Applicable equipment: Gasonics Aura 1000/2000 plasma cleaning system, etc
Application scenarios
Self diagnosis of plasma cleaning system
Real time monitoring of various process signals inside the cavity, once abnormalities are detected, the system will trigger an alarm or stop processing to protect the wafer from damage.
Process monitoring and protection
Continuously monitor the operational status of key components such as power supply, gas controller, RF generator, etc.
Fault isolation and alarm prompt
When the system detects that parameters such as air pressure, voltage, or temperature deviate from the normal range, issuing an alarm can help quickly locate the fault point.
Product advantages
Improving equipment safety: potential risks can be detected in a timely manner and processes can be suspended to prevent equipment damage
Modular design: easy to replace and maintain, suitable for long-term operating environments
Accurate diagnosis: In conjunction with the main control system, it can provide detailed reports of abnormal areas, which helps improve operational efficiency
Strong adaptability: compatible with multiple Gasonics systems and supports customized maintenance solutions
Product imag
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