AMAT Applied Materials 0190-16633 Magnet Driver

AMAT Applied Materials 0190-16633 Magnet Driver

Product Details Introduction

1、 Product Overview

AMAT 0190-16633 Magnet Driver Module is a high-precision power driver module used for magnetic field control systems in AMAT (Applied Materials) semiconductor equipment.

The main function of this module is to provide stable DC driving current for electromagnetic coils (Magnet Coil) in vacuum chambers or deposition systems, thereby controlling the magnetic field strength and distribution, improving the plasma uniformity and ion density distribution during deposition or etching processes.

It is commonly used in PVD (Physical Vapor Deposition) systems, CVD systems, Etch plasma reaction chambers, and other equipment, and is one of the core electronic components for controlling magnetic field uniformity and plasma morphology.

2、 Product Features

High precision magnetic field control

The output current has extremely high linearity and can achieve precise adjustment of magnetic field strength;

Support Constant Current Mode to ensure stable magnetic field without drift;

Suitable for multi area independent magnetic control configuration (upper magnetic field, lower magnetic field, circular magnetic field, etc.).

Low noise, low ripple output

Adopting efficient linear steady current circuit and filtering design, the magnetic field changes are extremely smooth;

The typical value of output current ripple is less than 0.5%, reducing plasma jitter.

Fast dynamic response

The internal control circuit has a high-speed feedback loop that can quickly respond to system magnetic field adjustment signals;

Improve the transient control performance of ion density and process rate within the cavity.

A comprehensive protection mechanism

Equipped with overcurrent (OCP), overvoltage (OVP), and over temperature (OTP) protection;

Support open/short circuit detection and automatic shutdown of magnetic coils;

Built in status indication and alarm output interface for easy monitoring by the main control system.

Modular structural design

Independent and pluggable modules, easy to install and replace;

Compatible with the AMAT main power architecture, facilitating system expansion and maintenance.

High reliability industrial grade design

Using high-voltage MOSFET or IGBT components, supporting long-term continuous output;

Internal heat conduction path optimization, with efficient air cooling or bottom plate heat dissipation structure;

Adapt to clean room and vacuum process environments.

Intelligent control and monitoring interface

Provide analog control signal interface (0-10V/4-20mA);

Real time feedback of output current, voltage, and temperature status signals;

It can achieve closed-loop regulation with the system main control or RF control unit.

AMAT Applied Materials  0190-16633 Product imag

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