AMAT 0195-10582 Chassis Control Box

AMAT  0195-10582 Chassis Control Box

Product Details Introduction

AMAT 0195-10582 Chassis Control Box

Product Overview

AMAT (Applied Materials) 0195-10582 Chassis Control Box is an electrical and electronic integrated unit used in semiconductor manufacturing equipment, typically installed in the equipment chassis position. It undertakes core functions such as power distribution, control signal management, and interlock protection, providing a stable operating environment and centralized management capability for sub modules inside the equipment (such as gas valves, heaters, detectors, controllers, etc.). The chassis control box is an important infrastructure to ensure the long-term reliable operation of equipment.

Technical parameters (typical direction, specific data should refer to the original factory information)

System type: Chassis integrated power and control module

Power input: Industrial standard AC power supply, multiple outputs

Interface: Digital/Analog I/O interface, compatible with AMAT internal modules and upper computer system

Safety functions: overvoltage, overcurrent, short-circuit protection and interlock logic

Applicable environment: high cleanliness, semiconductor process equipment chassis installation

Modular design: supports on-site maintenance and upgrade expansion

Application scenarios

Deposition process (CVD/PVD/ALD)

Provide stable power supply and control signals for chamber heaters, gas valves, pumps, and detector boards

Coordinate the operation of submodules to ensure the uniformity of thin film deposition and process stability

Etching process equipment

Control sub modules such as RF power module, gas flow, pressure sensor, etc

Realize etching accuracy control and process consistency

Ion implantation system

Provide power and signal interfaces for ion sources, scanning systems, and beam monitoring modules

Ensure injection dose and uniformity

Gas and vacuum system control

Centralized management of valves, flow meters, vacuum pumps, and pressure sensors

Ensure stable chamber environment

Factory automation and safety interlock

Interface with the upper monitoring system to achieve interlocking, alarm, and security protection functions

To avoid losses caused by abnormal operation of equipment

R&D and laboratory process validation

Provide a modular electrical control platform to support new process development and experimental debugging

AMAT 0195-10582 Chassis Control Box  Product imag

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