AMAT 0090-10396 RF Filter Box

AMAT  00090-10396 RF Filter Box

Product Details Introduction

AMAT 0090-10396 RF Filter Box

Product Overview

AMAT (Applied Materials) 0090-10396 RF filter box is an electronic module specifically designed for semiconductor manufacturing equipment, mainly used for filtering and adjusting RF signals. It can suppress unnecessary frequency interference, ensure the purity and stable output of RF power, thereby improving the performance of plasma sources or RF drive modules. This module is typically used in process equipment that requires RF control, such as deposition and etching.

Technical parameters (typical direction, specific data should refer to the original factory information)

Filter type: RF signal bandpass/low-pass/high pass filtering, reducing noise and interference

Working frequency range: RF signal specifications according to process requirements

Interface: Input/output RF signal port, compatible with AMAT RF control module

Signal characteristics: low insertion loss, high isolation, ensuring signal quality

Environmental adaptability: high cleanliness, low electromagnetic interference environment

Structure: Modular design for easy integration and maintenance of equipment

Application scenarios

Deposition process (PVD/CVD/ALD)

Filter the RF power output to ensure stable plasma power

Improve the uniformity and process repeatability of thin film deposition

Etching process equipment

Suppress stray frequencies in RF signals to avoid interference with the cavity plasma

Accurate control of etching rate and process profile

Plasma source and RF drive system

Purification and matching of RF signals to improve power transmission efficiency

Ensure multi module RF synchronization and stability

Equipment maintenance and upgrade

Replaceable modular filter box, supporting equipment performance optimization and signal debugging

AMAT 0090-10396 RF Filter Box  Product imag

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