AMAT 0010-77681 Control Box System

AMAT  0010-77681 Control Box System

Product Details Introduction

AMAT 0010-77681 Control Box System

Product Overview

The AMAT (Applied Materials) 0010-77681 control box system is a centralized control unit for semiconductor manufacturing equipment, typically consisting of power modules, controllers, interface circuits, and necessary safety protection components. As the core hub of electronic and electrical systems, it is responsible for distributing power to various sub modules (such as gas valves, heaters, detector boards, drive modules, etc.), transmitting control signals, and achieving centralized monitoring and management of equipment.

Technical parameters (typical direction, specific data should refer to the original factory information)

System type: Integrated power, control, and signal distribution chassis system

Input power supply: Industrial standard AC power supply, supporting multiple voltage outputs

Interface type: Multi channel digital/analog I/O, supporting connection with internal controllers, sensors, and actuators of the device

Safety functions: overload protection, overvoltage protection, short circuit protection, and interlock logic

Adaptation Platform: Suitable for various deposition, etching, ion implantation, and related semiconductor process equipment in AMAT

Application scenarios

Deposition process (CVD/PVD/ALD)

Provide stable power and control signals for chamber heaters, gas valves, pumps, and detector modules.

Coordinate the operation of various subsystems to ensure the uniformity of thin film deposition and process stability.

Etching process equipment

Control the operation of the RF power module, gas flow rate, and pressure sensor to achieve precise etching process control.

Ion implantation system

Responsible for power and signal management of ion sources, scanning systems, and beam monitoring modules to ensure dose and uniformity.

Gas and vacuum system control

Centralize the management of valves, flow meters, vacuum pumps, and pressure sensors to maintain a stable chamber environment.

Factory automation and safety interlocking

Implement the interface between the device and the upper monitoring system, and execute interlocking, alarm, and security protection logic.

R&D and laboratory process validation

Provide a modular and scalable electrical control platform that supports new process development and experimental validation.

AMAT  0010-77681 Control Box System  Product imag

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