AMAT Applied Materials 0010-81309 Temperature Control Unit Component

AMAT Applied Materials  0010-81309 Temperature Control Unit Component

Product Details Introduction

1. Temperature control performance (AMAT 0010-81309)

The temperature control range covers -50~300 ℃ (suitable for semiconductor process chambers and heating platforms), using PID closed-loop control with a temperature control accuracy of ± 0.1 ℃. It supports rapid heating (heating rate ≥ 5 ℃/min) to avoid temperature fluctuations affecting process stability.

Integrated multiple temperature acquisition channels (estimated to be 4-8 channels), compatible with thermocouples (K/J type) and RTD sensors, can monitor temperature in multiple areas in real time, automatically adjust output power in case of abnormalities, and ensure temperature uniformity throughout the entire area.

2. Adaptation and linkage (AMAT 0010-81309)

The output interface can directly interface with the AMAT 0190-35176 heater driver, support 4-20mA analog signal/RS485 communication, and can receive temperature data from the 0120-00794 process sensor motherboard, forming a "acquisition control execution" closed loop.

Compatible with AMAT 0190-24007 single board computer, supports Modbus protocol, can remotely set temperature threshold and start stop time, compatible with ENDURA ®  Automated temperature control link for semiconductor equipment.

3. Safety and Protection (AMAT 0010-81309)

Integrated over temperature protection (triggering power-off when exceeding the set value by 10 ℃), sensor disconnection alarm, overcurrent protection (cutting off when exceeding the rated current by 150%), immediately lock the output and send an alarm signal to the main control system in case of a fault.

Adopting electrical isolation design (isolation voltage ≥ 2500V DC), anti electromagnetic interference meets EN 55022 Class B standard, adapts to complex electromagnetic environment in semiconductor workshop, and avoids temperature control deviation caused by signal interference.

4. Reliability (AMAT 0010-81309)

The core components (temperature control chip, relay) are industrial grade models that have undergone high and low temperature aging (-40~+85 ℃) and 100000 cycles of temperature control testing. The MTBF is ≥ 80000 hours and supports continuous operation for 7 × 24 hours.

Compliant with UL/CE/RoHS certification and SEMI industry standards, the original factory provides a 1-3 year warranty, and spare parts can be quickly replaced to reduce equipment downtime caused by temperature control failures.

AMAT Applied Materials 0010-81309 Product imag

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