AMAT Applied Materials AM9090-00923IT Vacuum Control Chassis

AMAT Applied Materials AM9090-00923IT Vacuum Control Chassis

Product Details Introduction

Product Overview

AMAT AM9090-00923IT Vacuum Control Chassis is the core foundational module used in Applied Materials semiconductor equipment for managing and controlling vacuum systems. It provides electrical interfaces and structural support for vacuum pumps, valves, sensors, and vacuum monitoring devices, enabling precise adjustment and monitoring of the vacuum status of equipment chambers. It is an important component to ensure the stability of processes such as deposition, etching, and ion implantation.

Technical parameters (inference and industry norms)

Type: Vacuum Control Chassis/Vacuum Control Module Support Frame

Function: Electrical connection, signal integration, module fixation

Supporting equipment: vacuum pump, vacuum valve, pressure sensor and related control module

Interface form: Multi channel electrical interface, supporting digital and analog signal transmission

Mechanical characteristics: stable support, vibration resistance, high temperature resistance, and cleanroom compatibility design

Working environment: Inside semiconductor process equipment, suitable for low voltage or high vacuum environments

Compatible devices: Applied Materials various deposition (CVD/PVD), etching (Etch), ion implantation systems

Application scenarios

Vacuum system control

Integrate electrical interfaces and control modules to achieve unified management of vacuum pumps, valves, and sensors.

Vacuum parameter monitoring

Real time collection of chamber pressure and vacuum system status, providing feedback to the main controller.

Process stability guarantee

By precisely controlling the vacuum level, the uniformity and repeatability of deposition, etching, and ion implantation processes are ensured.

Equipment maintenance and module replacement

The modular chassis design facilitates the replacement of vacuum control components and reduces downtime.

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