AMAT 0190-18266 Pneumatic Locking Component

AMAT  0190-18266 Pneumatic Locking Component

Product Details Introduction

AMAT 0190-18266 Pneumatic Locking Component

Product Overview

AMAT (Applied Materials) 0190-1826 Pneumatic Locking Assembly is a mechanical positioning and fixing module used in semiconductor manufacturing equipment, which achieves rapid locking or releasing of equipment components through pneumatic drive. It is usually used to fix reaction chambers, process modules, or movable trays, ensuring the stability and precise positioning of components during the process, while supporting quick disassembly and maintenance.

Technical parameters (typical direction, specific data should refer to the original factory information)

Drive mode: Pneumatic actuator

Locking force: the mechanical force required to fix the equipment components

Journey: According to the module design, it can achieve complete locking and releasing

Interface: Pneumatic pipeline interface, compatible with equipment control system

Installation method: Modular, easy to integrate into equipment chassis or cavity modules

Environmental adaptability: Suitable for semiconductor cleanrooms and high-temperature, vacuum process environments

Application scenarios

Deposition process (CVD/PVD/ALD)

Lock the cavity or process module to ensure the accuracy of the process position during the thin film deposition process

Support quick disassembly and assembly for equipment maintenance or module replacement

Etching process equipment

Fixed etching chamber or process components to ensure etching uniformity and process repeatability

Ion implantation system

Lock the scanning system or beam module to maintain precise alignment and stability

Equipment maintenance and operation

Provide safety locking function to prevent accidental sliding or loosening of moving parts

Support quick release for easy on-site maintenance and module replacement

Automated process platform

Combined with pneumatic control system, achieve remote automatic locking and releasing, and improve operational efficiency

AMAT 0190-18266 Pneumatic Locking Component  Product imag

AMAT 0190-18266 Pneumatic Locking Component Related website links

IS220PPDAH1B 336A5026ADP14 Gas turbine module
WATLOW ANAFAZE CLS208 thermostat
GE IS200SDIIH1ADB Electronic module

Other website links

IS420PUAAH1A 控制器模块
3BUS208796-501通信模块
GE IS220PSCAH1A 模拟输入/输出模块