AMAT Applied Materials 0010-19188 Cooling Lift

AMAT Applied Materials  0010-19188 Cooling Lift

Product Details Introduction

AMAT Applied Materials 0010-19188 Cooling Lift

Product Overview

0010-19188 is a Cooling Elevator/Wafer Lift Cooling Unit in AMAT semiconductor process equipment. It is mainly used for safe and uniform cooling and handling of wafers or process components after high-temperature processes. This module integrates mechanical lifting and cooling control functions to ensure temperature control of the wafer during transfer or entry into the next process step, avoiding thermal stress or damage.

Technical functions and features

Wafer or component cooling

Through cooling plates or coolant circulation systems, achieve rapid and uniform cooling of wafers.

Support temperature monitoring and closed-loop control to ensure that the cooling curve meets the process requirements.

Lift and transport function

The mechanical lifting device can safely transfer wafers or carriers to designated positions.

Integrate with robot interfaces or Loadlock systems to achieve automated handling.

Security interlock design

The lifting process is interlocked with the cabin door, vacuum pump, gas supply and other systems to prevent misoperation.

Automatically stop operation in case of abnormal temperature or mechanical failure to protect wafers and equipment.

Modularity and easy maintenance

Modular design allows for quick disassembly, replacement, or maintenance, reducing downtime.

Compact structure, suitable for semiconductor cleanroom environment.

Application field

CVD/PVD process equipment

After the thin film deposition is completed, provide uniform cooling of the wafer to avoid the generation of thermal stress.

Combined with wafer transfer system to achieve continuous process operation.

Etching equipment

After the high-temperature etching is completed, the wafer is cooled to prepare for subsequent processes such as photolithography or cleaning.

Wafer Transfer and Loadlock System

The elevator collaborates with Loadlock doors and handling robots to achieve safe temperature controlled handling of wafers from vacuum chambers to atmospheric chambers.

Automatic production line

Support batch processing of wafers, reduce manual intervention, improve process consistency and production capacity.

AMAT Applied Materials  0010-19188 Cooling Lift Product imag

AMAT Applied Materials 0010-19188 Cooling Lift

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