MKS AS01496-AB-4 Control Board

MKS AS01496-AB-4 Control Board

 Introduction

MKS AS01496-AB-4 control board is used for closed-loop control of gas flow and pressure in semiconductor equipment, and is compatible with MFC flow controller signal processing

1. High precision analog data acquisition with small reading errors in flow and pressure values

2 independent signal channels can synchronously control multiple groups of gas pipelines

3 optocoupler isolation circuit isolates cavity RF electromagnetic interference

4 layers of precision wiring with low signal transmission loss and strong stability

5 standard plug-in card structure cabinet insertion and replacement is time-saving and convenient

6. Built in overcurrent, overvoltage, and short-circuit multiple circuit safety protection

7 supports factory specific communication bus docking with the main control unit of the whole machine

8 wide temperature substrate suitable for semiconductor dust-free clean room working conditions

9. Large area copper laying for heat dissipation, long-term full load, less prone to high temperature aging

10 strong and weak current line zoning layout to avoid signal crosstalk

11 gold-plated terminal interface anti-oxidation long-term contact without virtual soldering fault

Efficient maintenance and troubleshooting of equipment with over 12 reserved testing points

13 can store multiple sets of gas process parameters and switch processes with one click

14 Real time signal feedback automatically corrects flow output deviation

15. Suitable for various wafer process equipment for etching deposition film growth

MKS AS01496-AB-4 control board has precise signal processing and strong anti-interference ability to ensure stable operation of gas processes in semiconductor production lines

Product imag

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