AMAT Applied Materials 0900-01053 Filter

AMAT Applied Materials  0900-01053 Filter

Product Details Introduction

Product Overview

AMAT 0900-01053 filter is a high-precision purification component used in semiconductor manufacturing equipment, mainly for removing particles, impurities, and pollutants from gases or liquids. This module ensures the purity of gas supply, chemical transportation, and vacuum environment in semiconductor processes, thereby improving process yield and equipment reliability.

Technical Specifications

Filter object: process gas/process chemical liquid

Filtering accuracy: up to sub micron or even nanometer level (depending on process requirements)

Installation method: Modular interface design, easy to replace in AMAT system

Work environment: Suitable for high cleanliness, corrosive gases, or high temperature conditions

Life cycle: Long life design, able to withstand continuous process operation

Application field

gas supply system

Gas delivery pipelines used in CVD, PVD, ALD and other equipment ensure the purity of reaction gases without particle contamination.

Used for front-end filtration of MFC (Mass Flow Controller) to prevent particles from entering the quality control unit.

Chemical conveying system

Filter chemicals such as photoresist, wet etching solution, and cleaning solution to prevent impurities from affecting wafer surface treatment.

Ensure the stability and uniformity of CMP (chemical mechanical polishing) slurry.

Vacuum and gas emission system

Install at the inlet of the vacuum pump to prevent dust or chemical by-products from entering the pump body.

Remove harmful particulate matter in the exhaust treatment system to ensure emissions meet standards.

Online monitoring and maintenance

Combined with the process monitoring system of AMAT equipment, ensure long-term stability of gas and liquid transportation processes.

Suitable for key processes such as high-end logic chips, memory, and display panel production lines.

AMAT Applied Materials  0900-01053 Filter Product imag

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