AMAT Applied Materials 0100-01691 High Pressure Gas Interlocking Module

AMAT Applied Materials 0100-01691 High Pressure Gas Interlocking Module

Product Details Introduction

1. Adaptation scenarios and functions (0100-01691)

Equipment adaptation: High pressure gas pipeline system compatible with AMAT semiconductor process equipment (such as CVD deposition and etching machines), used for safety control of hazardous gases such as silane, ammonia, fluoride, etc., and adapted for gas transport links in 300mm wafer manufacturing.

Process compatibility: Focusing on safe use scenarios of high-pressure gas (0.5-10MPa), compatible with processes such as semiconductor film deposition and plasma etching that require high-pressure gas participation, and can be linked with equipment gas control cabinets and emergency shutdown systems.

Core function: Implement high-pressure gas pressure monitoring, leak detection, and interlock protection. When gas pressure is abnormal or a leak is detected, the valve will automatically shut off and sound and light alarms will be triggered to prevent gas leakage from causing safety accidents or process interruptions.

2. Accuracy and Performance (0100-01691)

Monitoring accuracy: pressure measurement range 0-15MPa, measurement error ≤ ± 0.5% FS, pressure resolution 0.01MPa, can accurately capture small pressure fluctuations of high-pressure gases; Leakage detection sensitivity ≤ 1 × 10 ⁻⁶ Pa · m ³/s (helium mass spectrometry calibration).

Response performance: Pressure sampling frequency ≥ 5Hz, interlock action response time ≤ 50ms, supports triple interlock triggering conditions of "pressure ultra-high/ultra-low, flow abnormal, pipeline temperature abnormal", and meets the rapid and safe control requirements of hazardous gases.

Signal compatibility: Supports 4-20mA analog signals (pressure data output) and RS-485 digital signals (status feedback), and can be connected to AMAT equipment PLC system to achieve remote pressure monitoring and interlock parameter configuration.

3. Structure and Protection (0100-01691)

Protection design: The valve body and detection module are made of 316L stainless steel material (corrosion resistance level ≥ 9), and the surface has been passivated; The enclosure protection level is IP66, and it is dust-proof and high-pressure spray cleaning resistant. The internal circuit has explosion-proof design (ATEX II 2G).

Installation adaptation: adopts flange/sleeve interface (interface specification 1/2 "-1"), supports horizontal/vertical installation of pipelines, and adapts to the compact layout of equipment gas pipelines; The wiring terminals are equipped with explosion-proof sealing sleeves to prevent gas from infiltrating the circuit and causing faults.

Easy to operate: equipped with a 1.8-inch OLED display screen, real-time display of gas pressure, interlock status, and fault codes; Support setting pressure thresholds locally through physical buttons, and can also be remotely debugged through dedicated software without disassembling the module.

AMAT Applied Materials  0100-01691  Product imag

AMAT Applied Materials  0100-01691  Related website links

IS200DSPXH1DBC Gas turbine module
IS200DSPXH1DBD Gas turbine electrical module
IS200EPSMG2ADC Electrical module

Other website links

1TGE120011R1111 控制器模块
Bently 3500/32M 149986-02 继电器模块
PFTL301E 3BSE019050R1000 1.0kN 压力传感器