AMAT Applied Materials 0680-01169 Heater

AMAT Applied Materials 0680-01169 Heater

Product Details Introduction

1、 Product Overview

AMAT Applied Materials 0680-01169 heater is an electric heating component designed to provide thermal energy for semiconductor equipment vacuum chambers and process components.

This heater is commonly used in equipment such as CVD, PVD, Etch (etching), etc. It is mainly used to maintain a constant temperature state of the chamber, base, or process gas to ensure process accuracy and deposition uniformity.

Its structure integrates heating resistor elements and temperature sensing protection devices (Thermistor or Thermal Sensor), which can achieve rapid heating and precise temperature control.

2、 Technical parameters

Project parameter description

Product model 0680-01169

Product Type: Heater Assembly

Functional heating and temperature detection

Rated voltage AC 240 V (three-phase)

Rated current 15 A

Frequency 50/60 Hz

Integrated heating plate or annular heating component in structural form

Heating element resistance wire/ceramic heating core (high temperature type)

Monitoring method with built-in thermistor or thermocouple interface

Temperature control range: normal temperature -400 ° C (typical process temperature zone)

Material characteristics: high-purity aluminum alloy or ceramic substrate, with vacuum compatibility

Installation method: fixed with flange or bracket, with quick plug port

Applicable environments include vacuum process chambers, gas transport panels, wafer transport platforms, etc

AMAT Applied Materials 0680-01169  Product imag

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