AMAT Applied Materials 0190-42550 Matching Network Module

AMAT Applied Materials 0190-42550 Matching Network Module

Product Details Introduction

Product Overview

The AMAT 0190-42550 matching network module is a key component used in semiconductor manufacturing equipment for radio frequency (RF) systems. Its main function is to achieve impedance matching between the RF power source and the load, ensure efficient power transmission, and protect the RF power source. This module is usually integrated into the RF power supply system of CVD, PVD, Etching (ETCH) and other process equipment.

Product Features

Efficient RF impedance matching

Accurate impedance matching can be achieved between the RF power supply and the process chamber load, improving power transmission efficiency.

Support dynamic matching, can automatically adjust according to load changes, ensuring process stability.

Wide frequency operating range

Suitable for common industrial RF frequencies (usually in the range of tens of kHz to MHz), it can meet the needs of different semiconductor processes.

High power processing capability

The module design can withstand high-power RF input, ensuring stable operation under high-power process conditions.

Internally, high voltage components and low loss coils are used to ensure reliability.

Low reflection, low loss design

Optimized circuit and component layout can reduce RF reflection and energy loss, protect power sources, and improve process consistency.

Protection and reliability

Internally equipped with overvoltage, overcurrent, and overtemperature protection functions, it can prevent abnormal working conditions from damaging modules or power sources.

Using high durability components, suitable for long-term continuous operation.

Compact modular design

Modular and standardized interfaces facilitate quick installation, replacement, or maintenance.

Small footprint, easy to integrate into equipment control cabinets or cavity RF systems.

Strong process compatibility

Can adapt to multiple models of AMAT semiconductor equipment, including deposition (CVD/ALD), etching (ETCH), metal deposition, etc.

Support multiple process load characteristics to ensure stable RF power output.

AMAT Applied Materials 0190-42550 Product imag

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