AMAT Applied Materials 0660-01879 Printed Circuit Board

AMAT Applied Materials 0660-01879 Printed Circuit Board

Product Details Introduction

AMAT Applied Materials 0660-01879 Printed Circuit Board

Product Overview

0660-01879 is a printed circuit board (PCB) used in AMAT semiconductor process equipment. It belongs to the electronic control module inside the device, serving as the core component of signal processing and control logic, used to connect, drive, and manage various sub modules in the system (such as gas panels, vacuum systems, interlock control, temperature and power regulation, etc.).

Technical functions and features

Signal Processing and Distribution

Receive signals from sensors (temperature, pressure, position, etc.) and adjust them accordingly.

Transfer the processed signal to the upper controller or related executing components.

Control and Execution

Drive actuators such as valves, relays, motors, heaters, etc. through circuits.

Implement functional logic such as switching, adjusting, and interlocking.

System interconnection

Establish electrical connections between the main control system (such as PLC, industrial computer) and the on-site subsystems.

As an I/O board, it provides stable input and output channels for peripherals.

Modularity and maintainability

Adopting standardized board design, supporting quick replacement.

Easy to maintain and upgrade equipment, reducing downtime.

Application field

CVD (Chemical Vapor Deposition) equipment

Manage gas panel and chamber control signals to ensure stable gas delivery and deposition processes.

PVD (Physical Vapor Deposition) equipment

Control the operation of external devices such as sputtering power supply, gas path valve, vacuum pump, etc. to ensure consistency in the coating process.

Etching equipment

Process gas flow rate, RF power supply, and chamber status signals, and perform interlock protection.

Cleaning/surface treatment equipment

Control the plasma source, heating unit, and gas input to ensure the controllability of the cleaning process.

Wafer Transfer and Loadlock System

Manage cabin doors, sensors, and robot interfaces to support safe operation of automated handling.

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