AMAT Applied Materials 0090-90140 Controller Module

AMAT Applied Materials 0090-90140 Controller Module

Product Details Introduction

Product application areas

Semiconductor process equipment vacuum system

Vacuum process equipment used for AMAT (such as CVD, PVD, Etch, etc.), mainly responsible for pumping, valves, and pressure regulation of the vacuum chamber.

Ensure a stable vacuum environment is maintained inside the process chamber to meet the requirements of thin film deposition, etching, ion implantation, and other processes.

Vacuum pump and gas flow control

Control the start stop and operation parameters of equipment such as dry pumps and turbo molecular pumps.

Coordinate the opening and closing of Mass Flow Controllers (MFCs) and valves to achieve precise management of gas input and discharge.

Equipment safety and interlock protection

By monitoring chamber pressure, valve status, pump speed, etc., safety interlocks are triggered to prevent chamber damage or process failure caused by abnormal vacuum environment.

Provide automated vacuum control logic during equipment startup, shutdown, and maintenance modes.

Data collection and system communication

Transfer the operating data of the vacuum system (pressure value, valve status, pump speed) to the main control computer.

Communicate with the central control system of AMAT equipment to achieve multi module linkage.

Equipment maintenance and replacement

As a dedicated module for AMAT equipment, 0090-90140 is commonly used in spare parts replacement and maintenance scenarios to quickly restore machine vacuum control capabilities and reduce downtime.

AMAT Applied Materials  0090-90140  Product imag

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