AMAT Applied Materials 0190-41186 Interlocking Module

AMAT Applied Materials 0190-41186 Interlocking Module

Product Details Introduction

AMAT Applied Materials 0190-41186 Interlocking Module

Product Overview

0190-41186 is an interlock module used in AMAT semiconductor process equipment. The main function of this module is to monitor the status of key components of the equipment, such as gas systems, vacuum systems, power supplies, and moving parts, and execute interlock logic to ensure that operations are prevented in abnormal or dangerous situations, thereby protecting the safety of the equipment and wafers.

Technical functions and features

Security interlock control

Real time monitoring of the status of gas valves, vacuum pumps, chamber doors, power supply modules, etc.

When it is detected that the safety conditions are not met, the relevant operations will be automatically interrupted to avoid process accidents.

Signal interface and logic processing

Receive input signals from sensors, switches, and control boards.

By logical judgment, feedback the safety status to the upper control system (such as the main control computer/PLC).

Emergency protection function

Trigger protection in case of abnormal conditions such as gas leakage, vacuum loss, high temperature, or door failure to close.

Having hardware level fast response to avoid relying solely on software latency.

Modularity and replaceability

Designed as standardized boards/modules, they can be quickly replaced during equipment maintenance, reducing downtime.

Application field

Semiconductor deposition equipment

In CVD, PVD and other process chambers, the gas supply, vacuum valve and chamber door status are interlocked to ensure the stability and safety of the deposition process.

Etching equipment

During the process of gas input and extraction in the reaction chamber, make safety judgments to avoid opening the gas or handling the wafer when the chamber is not under vacuum.

Cleaning and surface treatment equipment

Ensure the safety of highly reactive gases (such as O ₂, H ₂, etc.) during transmission and processing, and prevent leakage or chamber contamination caused by misoperation.

Wafer Transfer System

Perform interlocking during robot handling, Loadlock door opening/closing, and other processes to prevent wafer damage or system malfunctions.

AMAT Applied Materials 0190-41186 Interlocking Module Product imag

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