Kashiyama MU100U-148 Dry Vacuum Pump

Kashiyama MU100U-148 Dry Vacuum Pump 

 Introduction

Kashiyama MU100U-148 dry vacuum pump, multi-stage Roots oil-free dry pump, compact in size, suitable for rough pumping of load lock chambers in semiconductor equipment.

Product Features:

1. Fully dry oil-free structure, no oil return pollution, output clean vacuum

2. Non contact operation of the rotor, low wear, and good stability during continuous operation

3. Supports nitrogen purging and can handle water vapor and a small amount of process by-products

4. Compact and lightweight body, easy to integrate and install inside the device

5. Low vibration and low noise, suitable for long-term operation in clean workshops

Product Parameters:

1. Pump type: Multi stage Roots dry vacuum pump

2. Extraction speed: 1660L/min

3. Extreme vacuum: 1.5Pa

4. Power supply: three-phase AC200-220V

5. Inlet flange NW50, exhaust flange NW25

Application fields:

1. Pre vacuuming of semiconductor load lock chamber

2. Coarse exhaust of wafer transfer chamber

3. Pre stage exhaust of thin film coating equipment

4. Coarse vacuum source for plasma process equipment

5. Rough pumping operation of scientific research vacuum chamber

Compact energy-saving and clean pumping performance make Kashiyama MU100U-148 a commonly used front-end dry vacuum pump for semiconductor equipment

Product imag

ontroller Module

 3BHE024855R0101 UFC921A101 output signal card
 3BHL001863P0001 5SDD1060F0001 Silicon controlled rectifier
5SDF0860H0003 Silicon controlled rectifier

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