AE 31512411-220 power module

AE 31512411-220 power module 

 Introduction

AE 31512411-220 DC power module, a high-power DC power supply unit for semiconductor vacuum process, optimized for target sputtering scenarios.

Product Features:

1. Fast dynamic response, quickly adjust power in case of sudden load changes, and maintain stable process conditions

2. Intelligent ignition discrimination, distinguishing between normal discharge and malignant arc in the process, reducing unnecessary downtime

3. The local panel can view operating parameters and output fault signals directly to the machine for alarm logic

4. Optimization of internal heat dissipation ducts to withstand strong RF electromagnetic environments in workshop cabinets

5. Hot swappable rack structure, on-site replacement does not require complex wiring

Product Parameters:

1. Equipment type: Process DC power module

2. Supports pulse DC output with adjustable duty cycle

3. Integrated voltage and current real-time sampling circuit

4. Analog signal interface, external power setting

5. Working temperature of 5-50 ℃, cabinet installation

Application fields:

1. Power supply for magnetron sputtering metal targets

2. Reactive sputtering process for compound thin films

3. Semiconductor cavity plasma excitation power supply

4. Vacuum load DC drive for coating production line

5. Supporting equipment for various strong discharge vacuum processes

Excellent dynamic adjustment performance makes AE 31512411-220 a key power component in sputtering production lines

Product imag

ontroller Module

KONGSBERG RDC2 Driver module
VME162PA344SE Serial communication Card
5SHX1060H0003 3BHB020538R0001 IGCT module

Other website links

EMERSON VE4006P2 控制器模块
UAC389AE02 数字量输出模块
PROSOFT MVI46-MCM 通讯模块