AE 31512415-120 DC power module

AE 31512415-120 DC power module 

 Introduction

AE 31512415-120 DC power module, Pinnacle series high-power magnetron sputtering DC power supply, semiconductor PVD coating target power supply unit, compatible with AMAT platform thin film process.

Product Features:

1. Constant voltage and constant current dual-mode closed-loop control, low output ripple, ensuring repeatability of thin film process

2. Built in high-speed arc suppression, fast arc extinguishing, protecting the target material from damage caused by ignition

3. Support pulse DC output, adapt to reactive sputtering process, reduce target material poisoning phenomenon

4. Simulate IO communication interface, support remote power setting of the host, read back the running status and fault codes

5. Rack mounted air-cooled structure, resistant to cabinet RF interference, suitable for 7 × 24-hour production conditions

Product Parameters:

1. Equipment type: Pinnacle series magnetron sputtering DC power supply

2. Output modes: constant voltage, constant current, pulsed DC

3. Equipped with arc detection and rapid suppression function

4. Analog signal interface, external parameter setting and status feedback

5. Working temperature: 5-50 ℃, cabinet rack installation

Application fields:

1. Power supply for semiconductor PVD magnetron sputtering target material

2. Power supply for metal and alloy thin film deposition process

3. DC source for reactive sputtering coating equipment

4. Power supply for vacuum plasma surface treatment equipment

5. AMAT process platform thin film equipment supporting power supply

The arc suppression and pulse process adaptability make AE 31512415-120 the core power supply component of PVD coating process.

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