Edwards A730-02-983 dry vortex vacuum booster pump

Edwards A730-02-983 dry vortex vacuum booster pump 

 Introduction

Edwards A730-02-983 dry vortex vacuum pump, XDS35i model, semiconductor equipment oil-free pre stage vortex pump, used as a molecular pump backing pump.

Product Features:

1. Vortex dry oil-free structure, no oil reflux, ensuring vacuum cleanliness and no risk of oil pollution

2. The dynamic and static vortices operate without contact, with minimal wear and can run continuously for a long time

3. Install a gas damper that can remove water vapor and is compatible with mildly condensable process gases

4. Equipped with status monitoring, fault and temperature signal output, and connected to the main control alarm of the machine

5. Air cooled heat dissipation, compact size, low vibration and low noise, suitable for internal layout of machines

Product Parameters:

1. Pump type: Dry vortex vacuum pump

2. Extraction speed: 35m ³/h

3. Extreme vacuum: 7 × 10 ⁻ ³ mbar

4. Power supply: single-phase AC200-230V, 50-60Hz

5. Inlet NW40, air-cooled, remote IO communication interface

Application fields:

1. Semiconductor turbine molecular pump matched with front-end pumping

2. Rough vacuum extraction of small load lock chamber

3. Vacuum unit for wafer inspection equipment

4. Pre stage pump for plasma cleaning and small coating equipment

5. Obtaining rough vacuum for scientific research and analytical instruments

The clean, oil-free and compact body make the Edwards A730-02-983 a commonly used front-end vortex dry pump for small and medium-sized vacuum equipment.

Product imag

ontroller Module

EPRO PR6423/010-010-CN front sensor
KONGSBERG RDC2 Driver module
VME162PA344SE Serial communication Card

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