Adixen Pfeiffer A200L1115 vacuum dry pump

Adixen Pfeiffer A200L1115 vacuum dry pump 

 Introduction

Adixen Pfeiffer A200L1115 vacuum dry pump, a multi-stage Roots oil-free dry pump under the Pfeiffer brand, is a dedicated front-end pumping equipment for semiconductor load lock chambers.

Product Features:

1. Fully dry oil-free design, rotor operates without contact, eliminates oil vapor reflux, and ensures vacuum cleanliness

2. Fast response to high pumping speed, suitable for mass production cycle conditions of repeated pressure relief and pumping in the cavity

3. Equipped with gas town blowing function, it can handle water vapor and mild process corrosion by-products

4. Equipped with IO status feedback interface, fault signals can be uploaded to the device controller for easy operation and maintenance

5. Air cooled structure, low vibration noise, suitable for internal integration of clean workshop machines

Product Parameters:

1. Pump type: Multi stage Roots dry vacuum pump

2. Nominal pumping speed: 200m ³/h

3. Extreme vacuum: 1 × 10 ⁻⁴ hPa

4. Power supply: AC200-230V, 50-60Hz

5. Interface: 16 pin remote IO, air-cooled cooling

Application fields:

1. Rough exhaust of semiconductor load lock chamber

2. Pre vacuum operation of wafer transfer chamber

3. Pre stage vacuum unit for etching and PVD process equipment

4. Rough vacuum acquisition of vacuum coating equipment

5.300mm wafer processing equipment supporting front-end pump

The high pumping speed and resistance to process by-products make Adixen Pfeiffer A200L1115 a reliable dry front-end vacuum pump for semiconductor production lines

Product imag

ontroller Module

EPRO PR6423/010-010-CN front sensor
KONGSBERG RDC2 Driver module
VME162PA344SE Serial communication Card

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