Nikon 4S064-209-3 Linear Motor Controller

Nikon 4S064-209-3 Linear Motor Controller 

 Introduction

Nikon 4S064-209-3 (Yaskawa CLSR-1B-N2CD-1) linear motor driver, NSR-S204B lithography machine worktable dedicated servo drive unit, drives the precision linear motion platform of the lithography machine.

Product Features:

1. High speed fully closed-loop servo control, matched with grating encoder, achieves nanometer level repetitive positioning, ensuring exposure and engraving accuracy

2. Integrated overcurrent, overload, and overheating hardware protection, rapid shutdown for abnormal situations, and protection of linear motors and workpiece table mechanisms

3. Native adaptation to Nikon lithography machine motion bus, can directly interface with device controller to achieve trajectory synchronization calculation

4. The rack unit structure is easy to disassemble and replace, shortening the downtime and maintenance time of the lithography machine

5. Anti electromagnetic interference, suitable for strong electromagnetic, high cleanliness and harsh working conditions of lithography machine cabinets

Product Parameters:

1. Equipment type: Linear motor servo drive unit, model CLSR-1B-N2CD-1

2. Input: Three phase 200VAC, 50-60Hz, 20A

3. Control mode: dual closed-loop control of position and speed

4. Support high-precision grating encoder feedback signal access

5. Working temperature: 5-50 ℃, installed inside the cabinet

Application fields:

1. Nikon NSR-S204B Lithography Machine Workpiece Stage Linear Axis Drive Control

2. Motion control of semiconductor stepper lithography wafer carrier platform

3. High speed positioning drive for precision displacement module of lithography equipment

4. High end optical precision testing equipment driven by linear motor

5. Supporting drivers for the motion subsystem of semiconductor exposure equipment

Nano level driving performance and native compatibility of the entire machine make Nikon 4S064-209-3 the core power component of the lithography machine worktable

Product imag

ontroller Module

LEM LC100SSP7 Serial communication module
EPRO PR6423/010-010-CN front sensor
KONGSBERG RDC2 Driver module

Other website links

HIEE405246R0002 UNS0867A-P,V2 励磁控制板
PROSOFT MVI69E-MBTCP 输入输出模块
EATON XVH-340-57CAN-1-10 触摸屏幕