Equipe Technologies FPD-3153 Atmospheric Transport Robot

Equipe Technologies FPD-3153 Atmospheric Transport Robot 

 Introduction

Equipe Technologies FPD-3153 is a Clusterlock7000 atmospheric wafer transfer robot used for clean environment wafer handling and transfer.

Product Features

1. Compatible with Plasma Therm Clusterlock7000 cluster devices, interface matching

2. Low dust robotic arm, meeting the requirements of clean workshop handling

3. Multi degree of freedom movement, realizing wafer picking and placing, rotation and transfer

4. Equipped with position feedback, high positioning accuracy, and reduced debris risk

5. Support machine bus linkage, capable of continuous operation 24/7

Product Parameters

1. Model: FPD-3153

2. Type: Atmospheric wafer transfer robotic arm

3. Working environment: Clean atmospheric environment

4. Adaptation: Plasma Therm Clusterlock7000 cluster devices

5. Function: Wafer picking, transportation, and workstation handover

Application Areas

1. Semiconductor cluster equipment EFEM atmospheric wafer transfer

2. Transfer and transportation of wafers between load lock and wafer cassette

3. Automated material transfer for etching cluster equipment

4. Replacement and maintenance of the entire faulty transmission robot

5. Spare parts reserve for semiconductor automation robots

The FPD-3153 transfer robot is responsible for wafer material transfer and is a key execution unit for automated transfer of cluster equipment.

Product imag

ontroller Module

GJR5252300R0101 7AC91D Analog module
PSFLT-B2S0151 IDP10-AF1C01F Pressure transmitter
1X00416H01 WH5-2FF Power supply module

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