Edwards A71002909 Dry Vortex Vacuum Pump

Edwards A71002909 Dry Vortex Vacuum Pump 

 Introduction

Edwards A71002909 (ESDP-12) is a dry vortex vacuum pump from Edwards Semiconductors, used as a clean pre stage pump for rough pumping of vacuum chambers to obtain a rough vacuum environment.

Product Features:

1. The fully dry vortex oil-free structure prevents oil backflow and ensures the cleanliness of the internal process of the chamber

2. The vortex disk operates in a non-contact manner, resulting in minimal overall vibration and low operating noise

3. Integrated gas town function, capable of processing water vapor and a small amount of condensable process steam

4. Comes with status monitoring and supports signal output, making it easy for the machine to read the pump's operating status

5. Modular sealing components, easy to maintain and disassemble, suitable for continuous operation on production lines 24/7

Product Parameters:

1. Model: A71002909 (ESDP-12)

2. Pump type: Dry vortex vacuum pump

3. Inlet interface: NW flange interface

4. Cooling method: air cooling

5. Job positioning: Pre stage rough pump for semiconductor equipment

Application fields:

1. Rough vacuuming of semiconductor equipment chambers and load lock chambers

2. Turbomolecular pump is equipped with front-end support for air extraction

3. Coating and testing equipment vacuum system matching

4. Replacement and maintenance of the entire machine for the malfunction of the vortex pump on the production line

5. Vacuum spare parts inventory reserve in semiconductor factories

The A71002909 dry vortex pump outputs clean coarse vacuum and is a reliable front-end pumping unit for semiconductor small and medium-sized vacuum systems.

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