Edwards NRY0G9000XS vacuum pump

Edwards NRY0G9000XS vacuum pump 

 Introduction

Edwards NRY0G9000XS is a dry vacuum pump for Edwards semiconductor processes. It is used as a front-end pump for rough pumping of semiconductor cavities and is suitable for vacuum systems in etching and thin film equipment.

Product Features:

1. Fully dry oil-free structure, no oil vapor reflux, ensuring the cleanliness of the process chamber

2. Non contact operation of the rotor, low vibration and noise, suitable for clean workshop conditions

3. Built in gas stabilization function, capable of processing water vapor and some condensable process waste gases

4. Onboard status monitoring, fault alarm output, supporting machine communication docking

5. Modular maintenance structure, easy disassembly and assembly of sealing components, supporting 7 × 24-hour mass production operation

Product Parameters:

1. Model: NRY0G9000XS

2. Pump type: Semiconductor dry vacuum pump

3. Inlet interface: ISO standard flange

4. Cooling method: air cooling

5. Positioning: Front stage vacuum pump for process equipment

Application fields:

1. Pre stage vacuum pumping for semiconductor etching and PECVD equipment

2. Load lock vacuum lock chamber rapid rough extraction

3. Turbomolecular pump matched with front-end support pump

4. Replacement and maintenance of the entire machine for dry pump failure on the production line

5. Vacuum spare parts inventory reserve in semiconductor factories

The NRY0G9000XS dry pump outputs clean rough vacuum and is a key front-end pumping equipment for semiconductor vacuum units.

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