Brookhaven E22000032 Atmospheric Transport Robot

Brookhaven E22000032 Atmospheric Transport Robot 

 Introduction

Brookhaven E22000032 atmospheric transfer robot is a semiconductor equipment atmospheric environment wafer handling manipulator responsible for wafer transfer between wafer boxes and equipment workstations, with high positioning accuracy.

Product Features:

1. Multi axis servo linkage, smooth motion trajectory, reducing the generation of wafer fragments and particles

2. Specialized wafer end gripper, compatible with standard silicon wafers, with controllable clamping force to prevent fragmentation

3. Equipped with collision detection protection, stop immediately in case of interference, and protect the wafer and mechanism

4. Supports device bus communication and can be connected to the main control of the entire machine to achieve automatic flow operations

5. Dustproof design of the body, suitable for Class 1-10 environmental conditions in clean workshops

Product Parameters:

1. Equipment type: Atmospheric environment wafer transfer manipulator

2. Applicable wafers: 8/12 inch silicon wafer handling

3. Repeat positioning accuracy: ± 0.02mm

4. Power supply: 200-240VAC, equipped with servo drive unit

5. Working environment temperature: 18-28 ℃, used in clean workshops

Application fields:

1. Semiconductor equipment wafer box and pre alignment workstation wafer transfer

2. Material loading and unloading at the atmospheric end of wafer testing equipment

3. Probe station and testing equipment for automatic wafer transfer

4. Material exchange of atmospheric end sheet box for coating equipment

5. Automated wafer circulation in the atmospheric environment of semiconductor production lines

The high cleanliness handling and stable motion performance make Brookhaven E22000032 an important wafer transfer equipment at the atmospheric end of semiconductor production lines.

Product imag

ontroller Module

TU810V1 3BSE013230R1 base module
LEM LC100SSP7 Serial communication module
EPRO PR6423/010-010-CN front sensor

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