AE 3155999-247 Energy RF Navigator

AE 3155999-247 Energy RF Navigator 

 Introduction

AE 3155999-247 RF Matcher (Navigator II), a semiconductor plasma process RF impedance matching unit, quickly completes cavity load impedance matching, ensuring efficient RF power feeding into the process cavity.

Product Features:

1. High speed servo tuning, quickly matching when load impedance changes, reducing power reflection

2. Built in arc detection protection, instantaneous protection against abnormal standing waves for RF power supply and process chamber

3. Air cooled cooling structure, rack mounted standard installation, compatible with AMAT platform cabinets

4. Supports Ethernet and analog IO interfaces, can remotely read and write matching status and parameters

5. Anti process interference, suitable for frequent load fluctuations under etching and deposition conditions

Product Parameters:

1. Device type: Navigator II RF matching network

2. Operating frequency: 13.56MHz

3. Maximum RF power adaptation: 6000W

4. Cooling method: forced air cooling

5. Working temperature: 5-50 ℃, cabinet rack installation

Application fields:

1. AMAT etching equipment plasma cavity impedance matching

2. RF circuit matching for PVD magnetron sputtering thin film deposition

3. Semiconductor debonding and plasma cleaning process system

4. Impedance tuning between RF power supply and process chamber

5. RF circuit supporting unit for semiconductor mass production equipment

The fast tuning and stable impedance adaptation capability make AE 3155999-247 a key matching component in semiconductor plasma process systems

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