AE EX9698922S001 Turbomolecular Pump

AE EX9698922S001 Turbomolecular Pump 

 Introduction

AE EX9698922S001 turbomolecular pump, a specialized magnetic levitation turbomolecular pump for semiconductor process equipment, achieves clean ultra-high vacuum acquisition and is suitable for high vacuum conditions in plasma chambers.

Product Features:

1. Fully magnetic levitation bearings, with no mechanical contact between the rotor and almost no wear, reducing maintenance frequency

2. Low vibration amplitude, minimal interference to wafers and optical components, suitable for precision process environments

3. Built in pump body status monitoring, with output of speed, temperature, and fault signals for easy equipment monitoring

4. Supports installation from any angle and adapts to the layout of narrow cavities in devices

5. Corrosion resistant process gas, can be combined with a front-end dry pump to form a vacuum unit

Product Parameters:

1. Pump type: Magnetic levitation turbo molecular pump

2. High nitrogen pumping speed, suitable for ultra-high vacuum conditions

3. Cooling method: Water cooling for heat dissipation

4. Integrated driver control unit with complete communication interfaces

5. Working temperature: 5-45 ℃, used on the equipment side of the clean room

Application fields:

1. Establishment of ultra-high vacuum in semiconductor etching chamber

2. PVD and CVD thin film deposition equipment vacuum unit

3. High vacuum chamber pumping for wafer inspection equipment

4. Main pump for plasma process and vacuum coating equipment

5. Construction of ultra-high vacuum system for scientific research and analysis instruments

The low vibration and clean pumping performance make AE EX9698922S001 the core pumping component of high-end semiconductor vacuum systems.

Product imag

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