Nikon 4T070-360-1 Precision Controller Module

Nikon 4T070-360-1 Precision Controller Module 

 Introduction

The Nikon 4T070-360-1 precision controller module is a closed-loop control board for the optical mechanism of Nikon lithography machines, responsible for high-precision position calculation and command output of optical path components.

Product Features

1. Closed loop control algorithm to achieve nanoscale position control and ensure exposure and etching accuracy

2. Signal processing responds quickly, meeting the high-speed dynamic adjustment requirements of lithography equipment

3. Built in hardware protection mechanism to suppress abnormal shocks and protect backend execution amplifiers

4. Strong resistance to electromagnetic interference, suitable for complex electromagnetic environments in lithography machine cabinets

5. CPCI slot modularization, easy disassembly and replacement, reduces production line downtime

Product Specifications

1. Machine backplane power supply, compatible with the internal power supply circuit of the lithography machine

2. Multi channel control signal channel, connected to amplifier and position feedback sensor

3. Adapt to the internal dedicated bus of the device to complete the data exchange of the whole machine

4. Working environment temperature range of 5-40 ℃, suitable for semiconductor cleanrooms

5. Standard CPCI board specifications, directly installed in the chassis slot

Application Areas

1. Nikon NSR-S620D Immersion Lithography Optical System

2. Closed loop position control unit for alignment mechanism of lithography machine

3. Precision tuning control system for exposure light path

4. Scanning lithography machine signal processing unit

5. Repair and replacement spare parts for lithography equipment

The Nikon 4T070-360-1 precision controller module is a core control board spare part for the optical precision control of lithography machines.

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