Nikon 4S013-884 amplifier module

Nikon 4S013-884 amplifier module 

 Introduction

The Nikon 4S013-884 amplifier module belongs to the Nikon scanning lithography machine piezoelectric actuator driver board, which receives weak command signals from the main control and outputs high-power driving for the piezoelectric ceramic micro motion mechanism.

Product Features

1. Piezoelectric driven dedicated power output, fast dynamic response, meets the high-speed micro displacement adjustment of the mechanism

2. Built in current clamp to suppress piezoelectric reverse shock and extend the service life of actuator components

3. Onboard temperature sampling, automatic power reduction due to overheating, to avoid process drift caused by high temperatures

4. Isolate signal interface, isolate high-frequency noise inside the cabinet, and ensure pure output waveform

5. The board comes with a built-in fault status output, which facilitates machine logging and fault location

Product Specifications

1. Machine backplane power supply, compatible with lithography machine cabinet power supply system

2. Multiple piezoelectric drive output channels, matched with multiple sets of micro motion execution units

3. Equipped with feedback signal feedback channel, connected to the closed-loop control system of the whole machine

4. Working temperature range of 5-40 ℃, suitable for the operating conditions of dust-free workshop cabinets

5. CPCI standard board, directly aligned with the chassis slot for installation

Application Areas

1. Nikon series scanning lithography machine piezoelectric micro motion platform driver

2. Exposure light path lens fine-tuning mechanism power drive

3. Local micro adjustment unit of lithography equipment workpiece table

4. Optical system precision displacement actuator drive

5. Replacement and repair of faulty spare parts for lithography machines

The Nikon 4S013-884 amplifier module provides reliable power output for piezoelectric micro units and is a core board spare for ensuring the micro adjustment performance of lithography equipment.

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