ASTeX AX3060-14 RF Matcher

ASTeX AX3060-14 RF Matcher 

 Introduction

ASTeX AX3060-14 is an MKS-ASTeX semiconductor plasma RF matching device used for automatic impedance matching between RF power supply and process chamber, ensuring stable plasma process ignition.

Product Features:

1. Automatic impedance adjustment, quickly following changes in plasma load, reducing RF reflection power

2. Built in power detection sensor, real-time collection of forward and reflected power data

3. Water cooling and heat dissipation structure, suitable for long-term continuous operation of high-power plasma

4. Device bus communication, which can be linked with the machine master control to output matching status information

5. Compact metal shell, resistant to electromagnetic interference, suitable for installation in etching and deposition equipment cabinets

Product Parameters:

1. Model: AX3060-14

2. Equipment type: RF automatic impedance matching device

3. RF adaptation: Semiconductor process RF power supply

4. Cooling method: Water cooling

5. Purpose: Impedance matching and adjustment of plasma chamber

Application fields:

1. Plasma RF impedance matching for semiconductor etching equipment

2. PECVD thin film deposition process RF link matching

3. RF power coupling control of plasma process chamber

4. Replacement and repair of spare parts for RF matching equipment in production line faults

5. Inventory reserve of RF spare parts for semiconductor process equipment

The AX3060-14 RF matching device reduces RF power reflection and ensures plasma process repeatability, making it a core component of semiconductor RF systems

Product imag

ontroller Module

ICS TRIPLEX T8311 Interface module
HONEYWELL TC-PCIC02 Analog input card
PROSOFT MVI56-MCM Communication module

Other website links

HONEYWELL CC-PDIS01 气体检测仪
FOXBORO FBMSVH 电液伺服卡
PFEA111-65 3BSE050090R65 张力控制器模块