Parker Balston SF130972PHP Three Gas Nitrogen Generator

Parker Balston SF130972PHP Three Gas Nitrogen Generator 

 Introduction

Parker Balston SF130972PHP is a three channel integrated nitrogen generator that can synchronously supply high-purity nitrogen gas source to multiple workstations of semiconductor equipment.

Product Features:

1. Three independent outputs, capable of providing different flow rates and purity of nitrogen gas simultaneously, meeting the gas needs of multiple workstations at the same time

2. Multi stage composite filtration system, removes water vapor, oil and gas particles, and outputs gas with high cleanliness

3. Modular filter element components, easy to disassemble and replace, reducing on-site maintenance time

4. Pressure and flow closed-loop stabilization, small fluctuations in output gas source, ensuring stable process conditions

5. Compact structure of the cabinet, suitable for installation between equipment cabinets, supporting 7 × 24-hour continuous gas production

Product Parameters:

1. Model: SF130972PHP

2. Equipment type: Three gas integrated nitrogen generator

3. Input air source: dry compressed air

4. Output form: Three independent nitrogen output interfaces

5. Operation mode: Continuous and uninterrupted gas production work

Application fields:

1. High purity nitrogen gas supply for multiple workstations of semiconductor process equipment

2. Wafer cavity blowing, gas curtain protection, inert isolation gas supply

3. Supply of gas source for semiconductor detection and analysis instruments

4. Replacement of old nitrogen generators on the production line due to malfunction of the entire machine

5. Inventory reserve of spare parts for gas source equipment in semiconductor factories

The SF130972PHP three gas nitrogen generator provides stable gas supply through multiple channels and is an important supporting gas source equipment for multi station gas scenarios in semiconductor production lines.

Product imag

ontroller Module

HEIDENHAIN IK340 End connections
ICS TRIPLEX T8311 Interface module
HONEYWELL TC-PCIC02 Analog input card

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