TMP-3203LMEC-K1 Turbomolecular Pump

TMP-3203LMEC-K1 Turbomolecular Pump 

 Introduction

Shimadzu TMP 3203LMEC K1 turbo molecular pump, Shimadzu magnetic levitation molecular pump, and semiconductor cavity are the core components for achieving ultra-high vacuum. The quality of vacuum indicators is closely related to their operating status.

Product Features

1. Magnetic levitation bearings have no mechanical contact, no oil inside, eliminate oil return problems, and protect the cavity from contamination

2. The impeller undergoes anti-corrosion treatment, which can cope with various corrosive process gases and delay pump body loss

3. Water cooling and heat dissipation design, fast heat dissipation under high load conditions, suitable for 24-hour uninterrupted production

4. Flexible installation posture, can be assembled horizontally or vertically, suitable for different machine space layouts

5. Built in operation data collection, output alarm for abnormal speed and temperature, convenient for operation and maintenance personnel to make life prediction

Product Specifications

1. Rated speed 21000rpm, high pumping speed, responsible for establishing ultra-high vacuum in the chamber

2. Need to work together with a molecular pump driver controller

3. Inlet flange ISO320-F, exhaust KF40, connected to front stage dry pump

4. Equipped with signal communication interface, upload speed, temperature, and fault information

5. Can work stably in the semiconductor process exhaust gas environment for a long time

Application Areas

1. Etching equipment process chamber high vacuum extraction

2. PVD, CVD thin film deposition equipment main vacuum unit

3. Lithography machine load lock chamber ultra-high vacuum scene

4. Various vacuum process equipment requiring corrosion-resistant gases

5. Replacement and repair spare parts for broken pumps on the production line

Once the rotational speed of Shimadzu TMP 3203LMEC K1 turbo molecular pump is abnormal or the vacuum drops, it will directly cause the machine to skip the process and delay the production progress of the production line

Product imag

ontroller Module

DSQC639 3HAC025097-00116 Teaching module
VMIPCI-5565-110000 Steam gas turbine module
3BHE022294R0101 controller module

Other website links

086318-002 电路板模块
Bently 3500/44M-01-00 176449-03 振动监测器
YOKOGAWA NFJT100-S10E 自动化控制器